Applications:
- The damage inspection of the chip, wafer
- The scratch of reflective surface
- Bar code, QR code recognition
- Printing, silk-screen inspection
Illumination property diagram (LTS-3COX18-CP-W/3COX20-W model) & Uniformity (Relative irradiance):
Effect contrast photograph
Imaging instance: edge inspection
Features of spectrometer
| Advantages | Disadvantages | |
| Cube spectrometer |
Easy integration with 0 degree incident angle No light ray displacement The transmitted and reflected light have same length Shorten the system optical path |
Heavy and sturdy glass structure Difficult to do big size, and the cost is higher |
| Flate plate spectrometer |
Lightweight The cost is lower than cube spectrometer Easy to do the big size |
The transmitted and reflected light have different length Transmitted light ray displacement Need more time to aligning with 45 degree incident angle |
